Linear-time-varying feedforward control for position-dependent flexible structures

Fatemeh Sharifi, Hans Zwart, Marcel Heertjes, Nikolaos Kontaras

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Abstract

High performance motion systems in the semiconductor industry can achieve higher tracking accuracy when the structural dynamics of the system are taken into account. This work proposes an LTV feedforward control scheme which is based on the approximation of the system dynamics at low frequencies. The plant approximation contains both the low frequency contribution and resonance dynamics of the dominant modes. As an example of a flexible structure, the damped Euler-Bernoulli beam is investigated with considering the stable inversion of the approximated plant for feedforward control design. The results show a remarkable increase in positioning accuracy of the system being the consequence of the presence of feedforward control forces even when the reference setpoint accelerations equal zero.

Original languageEnglish
Title of host publicationEuropean Control Conference 2020, ECC 2020
PublisherIEEE
Pages1409-1414
Number of pages6
ISBN (Electronic)9783907144015
DOIs
Publication statusPublished - 20 Jul 2020
Event18th European Control Conference, ECC 2020 - Virtual event, Saint Petersburg, Russian Federation
Duration: 12 May 202015 May 2020
Conference number: 18
https://ecc20.eu/

Conference

Conference18th European Control Conference, ECC 2020
Abbreviated titleECC 2020
CountryRussian Federation
CitySaint Petersburg
Period12/05/2015/05/20
Internet address

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